Simultaneous measurement of in-plane and out-of-plane displacement using holographic interferometry

홀로그래피 간섭계를 이용한 횡변위와 종변위의 동시 측정

  • 김달우 (포항산업과학연구원 계측연구팀) ;
  • 임부빈 (포항공과대학 물리학과)
  • Published : 1997.08.01

Abstract

We set up a four-wave holographic interferometer using a symmetric dual-beam illumination which is to measure in-plane and out-of-plane displacement simultaneously. In order to acquire the displacement phase map we applied the phase-shifting method and removed the noise of the phase map with least-squares fitting. In this approach the access to information relative to both the difference and sum of phases existing in the two arms of four-wave holographic interferometer was allowed. As a result, in-plane and out-of-plane displacement was measured to the accuracy of λ/40 and λ/100, respectively at λ=632.8nm

Keywords

References

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