Abstract

The composite $MgF_2$-$TiO_2$ films are fabricated by codeposition from two independent sources. To improve optical and mechanical properties of films, the films are prepared by ion-assisted deposition. Chemical compositions, optical properties and microstructures of the composite films were investigated. The chemical composition rates of Ti:Mg of $MgF_2$-$TiO_2$ composite films are nonlinearly varied according to the relative deposition rate. It is found that the refractive indices of the composite films decrease with increasing $MgF_2$ contents and can be fitted quite well with Drude's formula and that the microstructures of the composite films changes from an amorphous to crystalline with increasing $MgF_2$ mole fractions.

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References

1. Thin Films for Optical System F. R. Flory
2. Thin Films for Optical Filters, 2nd Ed. H. A. Macleod
3. Appl. Opt. v.27 no.8 H. Sankur;W. J. Gunning;J. F. DeNatale
4. J. Appl. Phys. v.66 no.2 H. Sankur;W. Gunning
5. J. Appl. Phys. v.69 no.5 N. S. Gluck;H. Sankur;J. Heuer;J. DeNatale;W. J. Gunning
6. SPIE v.2046 F. C. Ho;C. H. Lee;R. Y. Tsai
7. Thin Solid Films v.113 S. F. Pellicori
8. Appl. Opt. v.31 no.28 N. S. Gluck;D. B. Taber;J. P. Heuer;R. L. Hall;W. J. Gunning
9. Appl. Opt. v.28 no.14 W. J. Gunning;R. L. Hall;F. J. Woodberry;W. H. South-well;N. S. Gluck
10. Appl. Opt. v.30 no.4 H. O. Sankur;J. DeNatale;W. J. Gunning
11. Opt. Eng. v.33 no.10 R. Y. Tsai;M. Y. Hua;C. T. Wei
12. 한국광학회지 v.5 no.1 조현주;이홍순;황보창권;이민희;박대윤
13. 한국광학회지 v.8 no.1 김형근;반승일;김석원;한성홍
14. 한국광학회지 v.4 no.3 한성홍;김석원;H. A. Macleod
15. SPIE v.2253 M. L. Fulton
16. J. Phys. v.9 J. C. Manifacier;J. Gasiot;J. P. Fillard
17. 한국광학회지 v.3 no.1 황보창권;진권휘;박대윤;이민희
18. Appl. Opt. v.18 no.12 H. K. Pulker
19. Phys. Rev. v.B35 K. H. Muller
20. Coatings on Glass H. K. Pulker
21. Phys. Thin Films v.8 R. Jacobsson;G. Hass(ed.);M. H. Fran-cembe(ed.);R. W. Hoffman(ed.)