The influences of laser-induced damage threshold by the post-processing of $Al_2O_3$ thin films

$Al_2O_3$ 박막의 후처리 효과가 Laser-Induced Damage Threshold에 미치는 영향

  • 유연석 (청주대학교 광학공학과) ;
  • 이성훈 (청주대학교 광학공학과)
  • Published : 1997.10.01


The influences of laser-induced damage threshold by the after-processing of $Al_2O_3$ thin films was investigated. The samples were fabricated at the substrate temperature of $100^{\circ}C$, $200^{\circ}C$, $300^{\circ}C$ and $350^{\circ}C$ respectively, and the LIDT were measured by using Nd:YAG laser. After the processing with baking and laser conditioning of the samples, the variation of LIDT was measured. It was found that LIDT was enhanced twice by laser-conditioning process and 1.5 times by baking process. In addition, we measured the chemical properties of the thin film structure before and after the processing by using XPS.



  1. Thin Films for Optical System Francois R. Flory
  2. Thin Solid Films v.260 N. Kaiser;H. Uhlig;U.B. Schallenberg;B. Anton;U. Kais-er;K. Mann;E. Eva
  3. Thin-Film Optical Filters(second edition) H. A. Macleod
  4. Thim Solid Films v.253 M. Reichling;J. Siegel;E. Matthias;H. Lauth;E. Hacker
  5. Appl. Opt. v.29 M. Zukic;D.G. Torr;J.F. Spann
  6. Opt-ical Interference Coatings. SPIE v.2253 M.R. Kozlowski;R.J. Tench;R. Chow;L. Sheehan
  7. Thin Films for Optical System. SPIE v.1782 C. Gallou;P. Isnard;H. Piombini;B. Schmitt
  8. Thin Films for Opt-ical System. SPIE v.1782 E. Hacker;H. Lauth;P. Wei brodt
  9. Optical Interference Coatings. SPIE v.2253 N. Kaiser
  10. Design of Optical Interference Codtings Alfred Thelen
  11. Appl. Opt. v.35 E. Eva;K. Mann;N. Kaiser;B. Anton;R. Henking;D. Ristau;P. Weissbrodt;D. Mademann;L. Raupach;E. Hacker
  12. Appl. Opt. v.34 E. Welsch;D. Ristau
  13. Appl. Opt. v.29 M. Commandre;E. Pelletier