Korean Journal of Optics and Photonics (한국광학회지)
- Volume 8 Issue 5
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- Pages.438-442
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- 1997
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- 1225-6285(pISSN)
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- 2287-321X(eISSN)
Abstract
In this study we report the effect of melt instability on the Liquid Phase Epitaxy. We made a new graphite boat of the structure relieving the instability of melt. It did not improve the uniformity of each layers but also reduced the thickness of growth layers and the deviation of the thickness over 1/2, 1/3 respectively. Moreover, we could get the growth layer of about 80
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References
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