The effect of melt instability on the liquid phase epitaxy

용액 불안정이 InGaAsP/InP 액상결정성장에 미치는 영향

  • 오수환 (한국해양대학교 전자통신공학과) ;
  • 안세경 (한국해양대학교 전자통신공학과) ;
  • 홍창희 (한국해양대학교 전자통신공학과)
  • Published : 1997.10.01


In this study we report the effect of melt instability on the Liquid Phase Epitaxy. We made a new graphite boat of the structure relieving the instability of melt. It did not improve the uniformity of each layers but also reduced the thickness of growth layers and the deviation of the thickness over 1/2, 1/3 respectively. Moreover, we could get the growth layer of about 80$\AA$. With the point of melt stability in view we investigated the effect of InP seed used in two phase solution method. It is concluded that the quality of layers grown by the single crystal is superior to that by the poly crystal in two phase solution method.



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