Preparation and Characterization of Anti-reflective and Anti-static Double Layered Films by Sol-Gel Spin-Coating Method

졸-겔 스핀코팅법에 의한 반사방지 및 정전기방지 복층막의 제조 및 특성

  • 이준종 (연세대학교 세라믹공학과) ;
  • 최세영 (연세대학교 세라믹공학과)
  • Published : 1997.01.01


Anti-reflective and anti-static double layered films were prepared on the VDT panel by sol-gel spin-coating method. Their electrical, opticla, and mechanical properties were investigated. The outer SiO2 film with low re-fractive index was coated over the inner ATO(Antimony-doped Tin Oxide)-SiO2 film which was prepared by mixing ATO sol with SiO2 at molar ratio of 68:32 to satisfy the interference condition of double layers. The heat treatment was conducted at 45$0^{\circ}C$ for 30 min where residual organics were completely removed. The sheet resistance of ATO single layer showed the minimum value of 6$\times$107$\Omega$/$\square$ at 3 mol% addition of Sb and that of SiO2/ATO-SiO2 increased slightly with increasing SiO2 mol% up to 30 mol%, and then increased steeply to the value of 3$\times$108$\Omega$/$\square$ at 32 mol%. The reflectance of double layered films was about 0.64% at the wavelength of 550nm and the transmittance increased about 3.20%. The hardness of double layered films was almost the same as that of uncoated VDT panel, 471.4kg.f/mm2.


Sol-gel;Spin-coating;Antistatic;Antireflective;Sheet Resistance;Reflectance;Hardness


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