- Volume 42 Issue 5
Analysis of Trace Impurities in The Bulk
$H_2$ and He Gases by a Cold Concentration Method
저온 농축법에 의한 수소와 헬륨 중의 미량가스 분석
- Lee, Taeck Hong (Daesung Sanso Co., Ltd., Daesung Cryogenic Research Institute) ;
- Park, Doo Seon (Daesung Sanso Co., Ltd., Daesung Cryogenic Research Institute) ;
- Son, Moo Ryong (Daesung Sanso Co., Ltd., Daesung Cryogenic Research Institute)
- Published : 19981000
Analysis of trace impurities in the gases has been very important with the development of semi-conductor related industry. Particularly, the contamination of the gas handling systems in a semi-conductor plant by the air has been a trouble to the manufacturers. Thus, the analysis of the air components in the system has been a task to the analysts. In this study, we report the analysis data with a expanded uncertainty for the trace impurities of nitrogen and argon in the bulk helium and hydrogen. All data show a good correspondence, exhibiting reliable statistical error ranges.
- 가스분석 한국표준과학연구원
- 월간 반도체 4월호 반도체용 특수가스 박두선;한주탁;손무룡
- KRISS-96-082-ET, 한국표준과학연구원 불확도 표현과 교정성적서 작성 한국표준과학연구원
- The Chemical Instrumentation(3rd Ed.) Strobel, H. A.;Heineman, W. R.
- KS, M1131
- 측정불확도 평가 및 표시에 관한 기술기준 개발연구 공업진흥청