Analysis of Trace Impurities in The Bulk $H_2$ and He Gases by a Cold Concentration Method

저온 농축법에 의한 수소와 헬륨 중의 미량가스 분석

  • Lee, Taeck Hong (Daesung Sanso Co., Ltd., Daesung Cryogenic Research Institute) ;
  • Park, Doo Seon (Daesung Sanso Co., Ltd., Daesung Cryogenic Research Institute) ;
  • Son, Moo Ryong (Daesung Sanso Co., Ltd., Daesung Cryogenic Research Institute)
  • 이택홍 (대성산소(주) 초저온연구소) ;
  • 박두선 (대성산소(주) 초저온연구소) ;
  • 손무용 (대성산소(주) 초저온연구소)
  • Published : 19981000

Abstract

Analysis of trace impurities in the gases has been very important with the development of semi-conductor related industry. Particularly, the contamination of the gas handling systems in a semi-conductor plant by the air has been a trouble to the manufacturers. Thus, the analysis of the air components in the system has been a task to the analysts. In this study, we report the analysis data with a expanded uncertainty for the trace impurities of nitrogen and argon in the bulk helium and hydrogen. All data show a good correspondence, exhibiting reliable statistical error ranges.

Keywords

References

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