The Micro Electromagnetic Force Measurement of Voice-coil Actuator using Semiconductor Piezoresistive Type Vibration Sensor

실리콘 압저항형 진동 센서를 이용한 Voice-coil형 구동기의 미소 전자력 측정

  • 권기진 (경북대 대학원 전기공학과) ;
  • 이기찬 (경북대 센서기술 연구소) ;
  • 박세광 (국가대학 대표학과)
  • Published : 1999.02.01

Abstract

Semiconductor piezoresistive type vibration sensor was fabricated by using semiconductor process and micromachining technology. To measure the micro electromagnetic force between coil and magnet, fabricated vibration sensor was used. Toapply micro electromagnetic force produced from the micro exciter, small-sized NdFeB permanent magnet was attached on the mass of the fabricated vibration sensor. The measured electromagnetic force are about 5~180dyne when the applied sinusoidal current of 1KHz in the range of 1.5~8mA. The measurement of micro electromagnetic forcewas performed by changing the distance between coil and magnet. Output characteristics of micro electromagnetic force according to the applied coil current were linear. Furthermore, output results were used to get the transfer constant that is important to decide the efficiency and the performance of the coil and magnet.

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