Quantification of the Scum on the Black Matrix Surface of Color Filter for LCD

LCD용 칼라필터의 Black Matrix 표면에 발생하는 잔사의 정량화

  • Received : 1999.02.03
  • Published : 1999.10.25


We estimated the quantity of the scum remaining on the Black Matrix (BM) surface of color filter. To do this, histogram was analyzed which was obtained from AFM image of the BM surface. We divided the histogram to two Gaussian functions of the free BM surface (1) and the scum (2), and calculated the areas ($a_1$, $a_2$) of both the Gaussian functions. We quantified the residue as the ratio of the area ($a_2/(a_1+a_2)$). As a result of the Gaussian functions of the free BM surface, it was revealed that another kind of residue remained on the BM surface. It was difficult to quantify it. but it could relatively be estimated from the average height and the standard deviation.


color filter;black matrix;photoresist;AFM


  1. Proc. Int. Microprocess Conf. K. Mizuno;S. Okazaki
  2. Proc. Int. Microprocess Conf. K. Tohda;T. Ohta;J. Yasukawa
  3. J. Soc. Inf. Display v.1 T. Sugiura
  4. IDRC '85 Conf. Record T. Sunata
  5. J. Photopolym. Sci. & Technol. v.2 T. Komarsu;K. Ichimura