Dynamic Modeling of an Fine Positioner Using Magnetic Levitation

자기 부상 방식 미세 운동 기구의 동적 모델링

Jeong, Gwang-Seok;Baek, Yun-Su

  • Published : 2000.05.01


In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.


Magnetic Levitation;Air Core Solenoid;Magnetic Field Density;Magnetic Flux;Electromotive Force;Induced Current;Optimization


  1. Purcell, E. M., 1995, Electricity and Magnetism, Vol. 2, McGraw-Hill
  2. Edminster, J. A., Electromagnetics, Schaums outlineseries, McGraw-Hill
  3. Wangsness, Roald K., 1979, Electromagnetic fields, John Wiley & Sons
  4. Vanderplaats, G. N., 1985, 'ADS-A Fortran Program for Automated Design Synthesis Version 1.10,' NASA CR-177985
  5. Nagaya, K., 1995, ' A Noncontact Permanent Magnet Levitation Table with Electromagnetic Control and Its Vibration Isolation Method using Direct Disturbance cancellation Combining Optimal Regulators,' IEEE Trans. on Magnetics, Vol. 31, pp. 885-896
  6. Tsuda, M., Higuchi, T., and Fujiwara, S., 1987, 'Magnetic Supported Intelligent Hand for Precise Assembly,' in Proc. 13th Ann. IEEE Industrial Electron., Con. (IECON '87), pp. 926-933
  7. Hollis, R. L., Salcudean, S. E., Peter Alia, A., 1991, 'A Six-Degree-of-Freedom Magnetically Levitated Variable Compliance Fine-Motion Wrist: Design, Modeling, and Control,' IEEE Trans. Robotics and Automations, Vol. 7, No. 3, pp. 320-332
  8. Echeverria, I., Rubio, M., 1995, 'High-Precision Magnetic Levitation Device with Electro-Optical Feedback, Rev. Sci. Instrum., Vol. 66, pp. 3931-3938
  9. Nagaya, K., Arai, N., 1991, 'Analysis of a Permanent Magnet Levitation Actuator With Electromagnetic Control,' J. of Dynamic Systems, Measurement, and Control, ASME, Vol. 113, pp. 472-478
  10. Steve Chen, S. J., Busch-Vishiniac, I. J., 1995, 'A Magnetically Levitated, Automated, Contact Analytical Probe Tool,' IEEE Trans. on Semiconductor Manufacturing, Vol. 8, No. 1, pp. 72-78
  11. Jayawant, B. V., 1981, Electromagnetic Levitation and Suspension Techniques, London : Edward Arnold
  12. Atherton, D. L., 1980, 'Maglev Using Permanent Magnets,' IEEE Trans. on Magnetics, Vol. 16, No. 1, pp. 146-148
  13. Tsukamoto, O., Chen, J. Z., 1988, 'A New Magnetic Levitation System with AC Magnets,' IEEE Trans. on Magnetics, Vol. 24, No. 2, pp. 1497-1500
  14. 정호섭, 1993, '원추형 능동 자기베어링계의 모형화 및 제어', 대한기계학회논문집, 제99권, pp. 3073-3082
  15. Imlach, J., 1991, 'Measured and Predicted Force and Stiffness Characteristics of Industrial Magnetic Bearings,' J. of Tribology, ASME, Vol. 113, pp. 784-788