The influence of preparation condition on optical property of sol-gel derived hybrid organic-inorganic silica glass thin films

제작조건에 따른 졸-겔 복합 실리카 박막의 광학적 성질 변화

  • 정재완 (인하대학교 공과대학 전자재료공학과)
  • Published : 2000.08.01

Abstract

We report that the crack-free organic-inorganic hybrid silica thin films were fabricated by sol-gel process using organometallic compounds as a precursor and that we have established very reproducible fabrication condition with systematic investigation of thickness and refractive index variations for various control parameters, such as, coating type, coating speed, chemical composition, prebake and postbake temperature. Additionally, we measured and compared the change of optical property with the UV exposure dose for three different kinds of photoinitiators. Furthermore, the fabrication of Ix4 MMI optical power splitter using the sol-gel thin film provides the possibility of various applications to the optical waveguide devices. vices.

Keywords

References

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