Force/Torque Control of Ultrasonic Motor with PWM Driving Method

PWM 구동방식을 이용한 초음파 모터의 힘/ 토크제어

  • 최병현 (성균관대학교 기계공학과 대학원) ;
  • 최혁렬 (성균관대학교 기계공학부)
  • Published : 2000.11.01


Ultrasonic motors(USM) has been emerging as one type actuators, which possess many advantages such as high torque, low weight, compact size and no magnetic field generation. In spite of these features, there are several problems to be solved, which are temperature rise in case of long term operation, non -linearity, and hysteresis. Among these, hysteresis cause the most serious problem in force/torque control applications. To cope with this paper we propose a new PWM driving method which can be applied to force/torque control applications. To cope with this problem, in this paper we propose a new PWM driving method which can applied to force/torque control of USM. To verify the proposed method, an experimental setup was built and several experiments were performed.


Ultrasonic motor(초음파모터);Piezo-electric material(압전소자);PWM drive(폭변조 구동);Force/torque control(힘/토크 제어)


  1. Tomovic, R. and McGhee, R. B., 1966, 'A Finite State Approach to the Synthesis of Bioengineering Control Systems,' IEEE trans. on Human Factor in Electronics, Vol. 7, No. 2, pp. 65-69
  2. Cha, I., Park, H. and Back, H., 1996, 'The Characteristics of Compensation on Temperature of Ultrasonic Motor with Robot Actuator by Fuzzy Controller,' IEEE Can! on Emerging Technologies and Factory Automation, pp. 752-758
  3. 최병현, 이규훈, 최혁렬, 1998, '초음파 모터를 이용한 장력 구동방식의 장착형 역촉감 제시기구의 개발,' 로보틱스 제어계측 자동화 종합학술대회 논문집, pp. 216-219
  4. 최병현, 최혁렬, 1998, '초음파 모터를 이용한 직접구동방식의 장착형 힘 제시기구의 개발,' 한국자동 제어 학술회의 논문집, pp. 1702-1706
  5. Izuno, Y., Izumi, T., Yasutsune, H., Hiraki, E. and Nakaoka, M., 1998, 'Speed Tracking Servo Control System Incorporating Traveling-Wave-Type Ultrasonic Motor and Feasible Evaluation,' IEEE Trans. on Industry Applications, Vol. 34, No. 1, pp. 126-132
  6. Nishihori, K., Ohkuma, S., Eryu, Y. and Sugimoto, T., 1991, 'Velocity Control of Ultrasonic Motors for Robot Arms by Pulse Width Modulation,' Trans. on Japan Society of Mechanical Eng., Vol. 57, No. 6, pp. 166-170
  7. Nishihori, K., Kondo, S., Obata, H. and Ouma, S., 1998, 'PWM Driving Characteristics of Robot hand With Fingers using Vibration-Type Ultrasonic Motors,' Trans. on Japan Society of Mechanical Eng., pp. 1355-1360
  8. Kaneko, M., Sihirara, T. and Tsuji, T., 1995, 'Active Control of Self-locking Characteristic of Ultrasonic Motor,' IEEE Inter. Conf. on Robotics and Automation, pp. 2928-2929
  9. Noma, H., Miyasato, T., Kitamura, Y. and Kishino, F., 1996, 'Hapitc and Visual Feedback for Manipulation aid in a virtual Environment,' ASME Journal of Dynamic Systems, Measurement and Control, Vol. 58, pp. 469-476
  10. Senjyu, T., Yokoda, S. and Uezato, K., 1997, 'A Study on High Efficiency Drive of Ultrasonic Motors,' Procs. of inter. conf. on Power Electronics & Drive System, pp. 365-370
  11. Senjyu, T., Yokoda, S. and Uezato, K., 1997, 'Position Control of Ultrasonic Motors using Slide Mode Control,' IPEMC '97, pp. 388-393
  12. Barth, H. V. 1973, 'Ultrasonic driven Motor,' IBM Tech. Disclosure Bull, Vol. 16, No. 7, p. 2263
  13. Sashida, T. and Kenjo, T., 1993, 'An Introduction to Ultrasonic Motors,' Oxford science publications
  14. Hagood, N. W. IV and McFarland, A. J., 1995, 'Modeling of a Piezoelectric Rotary Ultrasonic Motor,' IEEE trans. on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 42, No.2, pp. 210-224