A Study on the Standards for Xe Analysis by Wavelength Dispersive X-ray Spectrometer (WDS) of Electron Probe Micro Analysis (EPMA)

파장분산형 엑스선 분광기에 의한 전자탐침미세분석시 Xe 표준물질에 관한 연구

  • Received : 2000.04.27
  • Published : 2000.10.25

Abstract

In this paper it was described on the standards for Xe analysis by Wavelength Dispersive X-ray Spectrometer (WDS) of Electron Probe Micro Analyser. According to the experimental results, CsI and $BaCO_3$ are appropriate compounds as standard specimen for Cs, I and Ba which has not suitable pure metal standards. In the beam current of 10-30 nA range, the Cs x-ray intensity measured from CsBr and CsI was proportional to the beam current. It was found that the linear regression factor R, showing the linearity between the atomic number and x-ray intensity between In and Nd elements, was higher than 0.99 at 25 kV and PET crystal. The caJlculated x-ray intensity of Xe standard from this linear regression equation was 1.095 times higher than that ofTe at 25 kV.

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