내부제트 분사를 이용한 새로운 광섬유제조 화학증착 방법에 관한 연구

Hong, Choon-Keun;Choi, Man-Soo

  • 발행 : 2000.04.01


The present study has proposed a novel aerosol CVD utilizing an internal jet in the conventional MCVD reactor for the purpose of enhancing the deposition efficiency(and rate) and the uniformity of deposited film. The use of impingement of high temperature jet through a thin inner tube ensures the reduction of non-uniform particle deposition zone as well as higher thermophoretic particle deposition. It is shown that significant improvements have been achieved for both aspects of deposition efficiency and uniformity. As jet temperatures increase, the tapered length is reduced and deposition efficiency is significantly increased.


수정된 화학증착 공정;경사부착구간


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