자기 연마법에 의한 질화 규소계 세라믹 파이프 내면의 경면 연마 특성에 관한 연구

A Study of a New Precision Finishing Process for Inside Surface of Silicon Nitride Fine Ceramic Pipe by Application of Magnetic Abrasive Machining

  • 발행 : 2001.01.01


Results ar presented of a new process for internal precision finishing of slender fine ceramic pipes using a magnetic field generated by a permanent magnets. For finishing the interior surface of a long pipe, a new type of finishing equipment was developed which can be very easily used in an industrial surrounding. In general, the pipe is so slender that a conventional finishing tool is hardly inserted into the pipe deeply, being impossible to finish. Therefore, a new technology has been considered to finish inside of a slender ceramic pipe by a simple technique. In this experimental, Magnetic Abrasive Machining is applied for the inner surface of silicon nitride fine ceramic pipe using ferromagnetic particles mixed with chromium-oxide powder. It is shown the initial roughness of 2.6㎛ Ry(0.42㎛ Ra) in the inside surface can be precisely finished to the roughness of 0.1㎛ Ry(0.01㎛ Ra). This paper discusses the outline of the processing by the application of magnetic abrasive machining and a few finishing characteristics.


질화규소계 세라믹 파이프;자기연마법;경면연마


  1. 進村武男, 1996, '磁氣硏磨,' 機械技術, Vol. 44, No.1, pp. 49-60
  2. 進村武男, 會澤利夫, 1992, 磁氣硏磨法によるファインセラミックスの平滑加工-ダイアモンド磁性砥粒の開發とその硏磨性能,' 砥粒加工學會誌, Vol. 36, No. 2, pp. 91-99
  3. 進村武男, 王鳳輝, 會澤利夫, 1993, '磁氣硏磨法によるファインセラミックスの平滑加工に關する硏究-强磁性體粒子混合ダイアモンド磁性砥粒の硏磨能率向上效果,' 日本精密工學會誌, Vol. 59, No. 8, pp. 1251-1258
  4. 安永, 今中, 1974, 'メカノケミカル現象を應用した結晶材料の精密硏磨法.' セラミックス, Vol. 9, No. 4, pp. 21-28
  5. 進村武男, 山口人見, 1993, '精密硏磨法による內面の潤滑加工に關する硏究-ステンレス鋼圓管內面及びクリ-ンカスボンベ內面の精密硏磨,' 日本機械學會論文集(C 編), Vol. 59, No. 8, pp. 1261-1267
  6. 北鳴弘一, 車全浩, 鈴木淸, 植松哲太郞, 1994, 'ラツビグテ-プによるセラミックスのメカノケミカルポリシング,' 砥粒加工學會誌, Vol. 38, No. 3, pp. 159-165