Characterization and correction of bemding deformation in pizeoelectric ceramics displacement

길이변조용 압전소자의 휨 측정과 보정

  • 김재완 (한국표준과학연구원 레이저계측그룹) ;
  • 남승희 (한국표준과학연구원 레이저계측그룹) ;
  • 한재원 (한국표준과학연구원 레이저계측그룹)
  • Published : 2001.08.01

Abstract

We suggest a method to measure and correct bending deformation in piezoelectric ceramics displacement. The angle and direction of the bending deformation are measured by monitoring the position of a laser beam reflected on a mirror which is attached to the piezoelectric ceramics with the uncertainty of the angle measurement of $0.36\mu$rad. We divided the electrode of a piezoelectric ceramic into 3 parts and connected 3 capacitors to each electrode in order to apply different voltage to each electrode with one voltage supplier. The deformation was corrected by adjusting the capacitance of each capacitor and was reduced to 6.3%, comparing to the uncorrected case. By using this corrected piezoelectric ceramic to modulate the length of the ringdown cavity, the fluctuation of the decay time caused by the change in optic axis of the cavity was removed.emoved.

Keywords

References

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