Comparison of the Existing Wet Etching and the Dry Etching with the ICP Process Method

새로운 ICP 장치를 이용한 고온 초전도체의 Dry Etching과 기존의 Wet Etching 기술과의 비교

  • 강형곤 (전북대학교 전기공학과) ;
  • 임성훈 (전북대학교 전기공학과) ;
  • 임연호 (전북대학교 화학공학과) ;
  • 한윤봉 (전북대학교 화학공학과) ;
  • 황종선 (전남도립 담양대학교 전기전자공학부) ;
  • 한병성 (전북대학교 전기공학과)
  • Published : 2001.02.01

Abstract

In this report, a new process for patterning of YBaCuO thin films, ICP(inductively coupled plasma) method, is described by comparing with existing wet etching method. Two 100㎛ wide and 2mm long YBaCuO striplines on LaAlO$_3$ substrates have been fabricated using two patterning techniques. And the properties were compared with the critical temperature and the SEM photography. Then, the critical temperatures of two samples were about 88 K, but the cross section of sample using ICP method was shaper than that using the wet etching method. ICP method can be used as a good etching technique process for patterning of YBaCuO superconductor.

References

  1. Phy. Rev. Lett. no.58 Superconductivity at 93 K in a new mixed-phase Y-Ba-Cu-O compound system at ambient pressure M. K. Wu;J. R. A. shbum;C. J. Tomg;P. H. Hor;R. L. Meng;L. Gao;Z. J. Huang;Y.Q. Wang;C. W. Chu
  2. KIEE v.48c no.4 MPMG법을 이용한 YBaCuO 초전도체의 임계특성에 영향을 미치는 파라미터 강형곤;임성훈;박성진;한병성
  3. KIEEME v.9 no.6 로울링법을 이용한 고온 초전도 다심선재 제조 김민기;허원일;최명호;한병성
  4. KIEEME v.11 no.4 용융성장시 서냉 시간과 후열처리 시간에 따른 임계특성 임성훈;최명호;강형곤(외)
  5. IEEE tran. on Appl. super. v.7 no.2 A new Three Terminal Vortex Flow Device A. Davidson;N. F. Pedersen
  6. Appl. Phys. lett. v.52 no.1 Reactive ion beam etching of Y-Ba-Cu-O superconductor S. Matsui;N. Takado;H. Tsuge;K. Asakawa
  7. Jpn.J. Appl. Phys. v.33 no.8A Submicron Patterning Technique for YBa CuO films Masanobu Kusunoki;Hiroyuki Akaike;Akira Fujimaki;Hisao Hayakawa
  8. J. Appl. Phys. v.70 no.12 Chemical plasma etching of Y-Ba-Cu-Oxide thin film M. R. Poor;C. B. Fleddermann
  9. Appl. Phys. Lett. v.69 no.8 inductively coupled plasma etching of GaN R. J. Shul;G. B. Mcclellan;S. A. Casainuovo;D. J. Rieger
  10. KIEEME v.11 no.10 Icp에 의한 BC13/C12 플라즈마내에서 Pt 박막의 시각 특성 김창일;권광호
  11. 초전도 입문 A. C. Rose-Innes;E. H. Rhoderick