Microstructures of Anatase TiO$_2$ Thin Films by Reactive Sputtering

반응성 스퍼터링법으로 제조된 anatase TiO$_2$박막의 미세조직에 관한 연구

  • Choe, Yong-Rak (Research Center for Advanced Magnetic Materials) ;
  • Kim, Seon-Hwa (Division of Materials and Chemical Engineering, Soonchungyang University) ;
  • Lee, Geon-Hwan (Korea Institute of Machinery & Materials)
  • 최용락 (고기능성 자성재료 연구센터) ;
  • 김선화 (순천향대학교 신소재·화학공학부) ;
  • 이건환 (한국기계연구원)
  • Published : 2001.09.01

Abstract

Anatase $TiO_2$ thin films as a photocatalyst were prepared by the D.C reactive magnetron sputtering process. The $TiO_2$ thin films were deposited on Si(100) substrates under the various conditions : oxygen partial pressure, working pressure, substrate temperature, D.C power, and deposition time. The morphology of the TiO$_2$ thin films showed an island structure. At early stages of film growth, amorphous phase formed. However, during the further growth, columnar crystalline $TiO_2$grains evolved. The crystallinity of the thin films depended on the oxygen partial pressure, the working pressure and the D.C. powers.

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