Pressure Control of a Piezoactuator-Driven Pneumatic Valve System

압전 작동기로 구동 되는 공압 밸브의 압력제어

  • Published : 2002.02.01


This paper proposes a new type of piezoactuator-driven valve system. The piezoceramic actuator bonded to both sides of a flexible beam surface makes a movement required to control the pressure at the flapper-nozzle of a pneumatic valve system. After establishing a dynamic model, an appropriate size of the valve system is designed and manufactured. Subsequently, a robust H$_{\infty}$ control algorithm is formulated in order to achieve accurate tracking control of the desired pressure. The controller is experimentally realized and control performance for the sinusoidal pressure trajectory is presented in time domain. The control bandwidth of the valve system, which directly represents the fastness, is also evaluated in the frequency domain.


  1. Simmonds, A. J., 1991, 'Electro-Rheological Valves in a Hydraulic Circuit,' IEEE Proceeding-D, Vol. 138, No. 4, pp. 400-404
  2. Whittle, M., Firoozian, R. and Bullough. W. A., 1994, 'Decomposition of the Pressure in an ER Valve Control System,' Journal of Intelligent Material Systems and Structures, Vol. 5, No. 1, pp. 105-111
  3. Choi, S. B., Rark, D. W., Cho, M. S., 2001, 'Position Control of a Parallel Link Manipulator Using Electro-Pheological Valve Actuators,' Mechatronics, Vol. 11, pp. 157-181
  4. Ray, C. A., Sloan, C. L., A. Johnson, D., Busch, J. D., Petty, B. R., 1992, 'A Silicon-Based Shape Memory Alloy Microvlave,' Materials Research Society Symposium Proceedings, Vol. 276, pp. 161-166
  5. Chonan, S., Jiang, Z. W., Tani, J., Orikasa, S., Tanahashi, Y., Takagi, T., Tanaka, M., and Tanikawa, J., 1997, 'Development of an Artificial Urethral Valve Using SMA Actuators,' Smart Materials and Structures, Vol. 6, pp. 410-414
  6. Vandelli, N., Wroblewski D., Velonis M., and Bifano T., 'Development of a MEMS Microvalve Array for Fluid Flow Control,' Journal of Microelectromechanical System, Vol. 7, No. 4, pp. 395-403
  7. Pemble, C. M., Towe, B. C., 1999, 'A Miniature Shape Memory Alloy Pinch Valve,' Sensors and Actuators A, Vol. 77, pp. 145-148
  8. Ikebe, Y. and Nakada, T., 1974, 'On a Piezoelectric Flapper Type Servovalve Operated by a Pulse-width-Flapper Type Servovalve Operated by an Pulse-width-modulated-signal,' ASME J. of Dynamic Systems, Measurement and Control, Vol. 96, pp. 89-94
  9. Zhao, Y. and Jones, B., 1993, 'Optimization of a Bimorph Piezotranslator Device For Electro-Pneumatic Power Conversion,' Mechatronics, Vol 3, No. 5, pp. 559-569
  10. Karl Spanner, 2000, 'Breakthrough in Piezo Actuator Applications,' Proceedings of the 7th Int. Conf. On New Actuators, Germany, pp. 236-241
  11. Active Control eXperts, Intermet Site, 2000, (
  12. McFarlane, D. C. and Glover, K., 1992, 'A Loop Shaping Design Procedure Using $H_{infty}$ Synthesis,' IEEE Transactions on Automatic Conrtol, Vol. 37, No. 6, pp. 759-769
  13. Watton, J., 1987, 'The Dynamic Performance of an Electrohydraulic Servo Valve/Motor System with Transmission Line Effects,' ASME Journal of Dynamic Systems, Measurement, and Control, Vol. 109, pp. 14-18
  14. Watton, J., 1989, 'Fluid Power System,' Prentice Hall
  15. Kim, D. H., Tsao, T. C., 2000, 'A Linearized Electrohydraulic Servovalve Model for Valve Dynamics Sensitivity Analysis and Control System Design,' ASME Journal of Dynamic Systems, Measurement, and Control, Vol. 122, pp. 179-187
  16. Choi, S. B. and Shin, H. C., 1996, 'A Hybrid Actuator Scheme for Robust Position Control of a Flexible Single-Link Manipulator,' Journal of Robotic Systems, Vol. 13, No. 6, pp. 359-370<359::AID-ROB3>3.0.CO;2-O
  17. McCloy, D., 1973, 'The Control of Fluid Power,' Wiley