DOI QR코드

DOI QR Code

Robust Design of the Vibratory Gyroscope with Unbalanced Inner Torsion Gimbal Using Axiomatic Design

공리적 설계를 이용한 비대칭 내부 짐벌을 가진 진동형 자이로스코프의 강건설계

  • 박경진 (한양대학교 기계.경영정보공학과) ;
  • 황광현 (한양대학교 기계설계학과) ;
  • 이권희 (동아대학교 기계공학과) ;
  • 이병렬 (삼성종합기술원, MEMS Lab.) ;
  • 조용철 (삼성종합기술원, MEMS Lab.) ;
  • 이석한 (삼성종합기술원, MEMS Lab.)
  • Published : 2002.05.01

Abstract

Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.

Keywords

Gyroscope;Robust Design;Axiomatic Design;Design Matrix;Sensitivity

References

  1. 정도현, 이병채, 2000, '확률조건의 근사화를 통한 효율적인 강건 최적설계 기법의 개발,' 대한기계학회논문집, 제 24 권, 제 12 호, pp. 3053-3060
  2. Lee, K.H. and Park, G.J., 2001, 'Robust Optimization Considering Tolerance of Design Variables,' Comput. Struct., Vol. 79, No. 1, pp. 77-86 https://doi.org/10.1016/S0045-7949(00)00117-6
  3. Hwang, K.H., Lee, K.W. and Park, G. J., 2001, 'Robust Optimization of an Automobile Rearview Mirror for Vibration Reduction,' Struct. Multidiscip. Optim., Vol. 21, No. 4, pp. 300-308 https://doi.org/10.1007/s001580100107
  4. 황윤동, 차성운, 2001, '발포 배율의 향상을 위한 금형 시스템의 공리적 설계,' 대한기계학회논문집, 제 25 권, 제 4 권, pp. 637-644
  5. Lee, K. H., Eom, I. S., Park, G. J. and Lee, W. I., 1996, 'Robust Design for Unconstrained Optimization Problems Using the Taguchi Method,' AIAA J., Vol. 34, No. 5, pp. 1059-1063 https://doi.org/10.2514/3.13187
  6. 이권희, 박경진, 1997, '설계변수의 공차를 고려한 구조물의 강건 최적설계,' 대한기계학회논문집, 제 21권, 제 1호, pp. 112-123
  7. 이권희, 박경진, 1998, '제한조건이 있는 문제의 이산설계 공간에서의 강건 최적설계,' 대한기계학회논문집, 제 22 권, 제 5 호, pp. 728-737
  8. Parkinson, A., 1995, 'Robust Mechanical Design Using Engineering Models,' ASME J. Mech. Des., Vol. 117, pp. 48-54
  9. Suh, N.P., 2001, Axiomatic Design: Advances and Applications, Oxford University Press, New York
  10. Phadke, M.S., 1989, Quality Engineering Using Robust Design, Prentice Hall, New Jersey
  11. Taguchi, G., Chowdhury, S., Taguchi, S., 1999, Robust Engineering, McGraw-Hill, New York
  12. Vanderplaatts, G.V., 2000, GENESIS User's Manual Ver. 6.0, VMA Engineering
  13. 박경진, 도성희, 서남표, 1999, '공리적 설계방법을 이용한 소프트웨어 시스템의 설계 및 확장,' 대한기계학회논문집, 제 23 권, 제 9 호, pp. 1536-1549
  14. 신문균, 홍성우, 박경진, 2000, '안전도를 고려한 전동 틸트/텔레스코픽 조향주의 해석 및 설계,' 대한기계학회논문집, 제 24 권, 제 6 호, pp. 1479-1490
  15. Lee, B.L., Lee, S.W., Jung, K.D., Choi, J.H. and Chung, T.R., 2001, 'A De-coupled Vibratory Gyroscope using a Mixed Micro-machining Technology,' Proc. IEEE International Conference on Robotics & Actuation, Vol. 4, pp. 3412-3416 https://doi.org/10.1109/ROBOT.2001.933145
  16. Han, J. S., Jung, D. H., Lee, B. C. and Kwak, B. M., 2001, 'Reliability Robust Design of a Vibratory Micro Gyroscope,' WCSMO-4, The 4th World Congress of Struct. Multidiscip. Optim., pp. 162-163
  17. Suh, N. P., 1990, The Principles of Design, The Oxford University Press, NewYork
  18. Geiger, W., Folkmer, B., Sobe, U., Sandmaier, H. and Lang, W., 1997, 'New Designs of Micromachined Vibrating Rate Gyroscope with Decoupled Oscillation Modes,' Transducer'97, Chicago, pp. 1129-1132 https://doi.org/10.1109/SENSOR.1997.635401
  19. Lutz, M., Goldberer, W., Gerstenmeier, J., Marek, J., Maihofer, B., Mahler, S., Munzel, H. and Bischof, U., 1997, 'A Precision Yaw Rate Sensor in Silicon Micromachining,' Transducer'97, Chicago, pp. 847-850 https://doi.org/10.1109/SENSOR.1997.635234
  20. Mochida, Y., Tamura, M. and Ohwada, K., 1999, 'A Micromachined Vibrating Rate Gyroscope with Independent Beams for the Drive and Detection Modes,' Proc. MEMS'99, Orlando, pp. 618-623 https://doi.org/10.1109/MEMSYS.1999.746899
  21. Song, H., Oh, Y.S., Song, I.S., Choi, S.O., Kim, H.C., Ha, B.J., Baek, S.S. and Song, C.M., 2000, 'Wafer Level Vacuum Packaged De-Coupled Vertical Gyroscope by Fabrication Process,' Proc. MEMS'2000, Miyazaki, Japan, pp. 520-524 https://doi.org/10.1109/MEMSYS.2000.838571
  22. Tanaka, K., Mochida, Y., Sugimoto, S., Moriya, K., Hasegawa, T., Atsuchi, K. and Ohwada, K., 1995, 'Micromachined Vibrating Gyroscope,' Proc. MEMS'95, Amsterdam, pp. 278-281
  23. Paoletti, F., Gretillat, M.-A. and de Rooij, N.F., 1996, 'A Silicon Micromachined Vibrating Gyroscope with Piezoresistive Detection and Electromagnetic Excitation,' Proc. MEMS'96, Atlanta, pp. 162-167 https://doi.org/10.1109/MEMSYS.1996.493847
  24. Maenaka, K., Fujita, T., Konishi Y. and Maeda, M., 1996, 'Analysis of a Highly Sensitive Silicon Gyroscope,' Sensors and Actuators A, Vol. 54, pp. 568-573 https://doi.org/10.1016/S0924-4247(97)80016-7