The Studies of Conductive and Non-Conductive Multi-Layer Depth Analysis by Radio Frequency Gas-Jet Boosted Glow Discharge Atomic Emission Spectrometry

Radio frequency gas-jet boosted 글로우 방전 원자 방출 분광법을 이용한 전도성 및 비 전도성의 다층 두께 분석에 관한 연구

  • Cho, Won Bo (Institute of development, High integrated technology Inc.) ;
  • Lee, Seong Hun (Institute of development, High integrated technology Inc.) ;
  • Jeong, Jong Pil (Institute of development, High integrated technology Inc.) ;
  • Choi, Woo Chang (Institute of development, High integrated technology Inc.) ;
  • Borden, Stuart (Institute of development, High integrated technology Inc.) ;
  • Kim, Kyu Whan (Institute of development, High integrated technology Inc.) ;
  • Kim, Kyung Mi (College of pharmacy, Dongduk women's university) ;
  • Kim, Hyo Jin (College of pharmacy, Dongduk women's university) ;
  • Jeong, Seong Uk (Pohang research institute of industrial science & technology) ;
  • Lee, Jung Ju (Pohang research institute of industrial science & technology)
  • 조원보 (에이치아이티 부설 연구소) ;
  • 이성훈 (에이치아이티 부설 연구소) ;
  • 정종필 (에이치아이티 부설 연구소) ;
  • 최우창 (에이치아이티 부설 연구소) ;
  • 스튜어드 보든 (에이치아이티 부설 연구소) ;
  • 김규환 (에이치아이티 부설 연구소) ;
  • 김경미 (동덕 여자 대학교 약학과) ;
  • 김효진 (동덕 여자 대학교 약학과) ;
  • 정성욱 (포항 산업 과학 기술 연구원) ;
  • 이중주 (포항 산업 과학 기술 연구원)
  • Received : 2002.03.29
  • Published : 2002.06.25

Abstract

A method was investigated to determine the thickness of coating on steel sheet using rf glow discharge atomic emission spectrometer. The RF gas-jet boosted glow discharge has such salient feature as good pleasure stability and high sputtering efficiency that it was possible to determine the thickness of silicon resin film on zinc electroplated steel. The erosion speed variation is dependent on discharge power, gas flow rate and discharge pressure. therefore determine discharge condition to measure the thickness of coating on steels. The fundamental studies have been carried out to investigate an optimum condition for in-depth analysis and composition of zinc coating on steel. In this study, the calibration curve for thickness determination of silicon resin film was found to be linear in the range of $1000{\sim}3500mg/m^2$ film thickness. The developed rf gas-jet boosted glow discharge was applied to the analysis of zinc coating and silicon resin film on steel made by RIST.

Keywords

RF gas-jet boosted nozzle;Depth profiling;atomic emission sepctrometry

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