Method for Measuring Mechanical Behaviors of Thin Films at High Temperature

고온에서 박막의 기계적 거동 측정 방법

  • 임상채 (전남대학교 대학원 기계시스템공학부) ;
  • 주재황 (전남대학교 대학원 기계시스템공학부) ;
  • 강기주 (전남대학교 공과대학 기계시스템공학부)
  • Published : 2003.01.01


Recently, the authors have developed a new material test system fur thin film at the high temperature. It is so compact and precise with sub micron resolution that it seems to be a useful tool fur research of the oxide film growth, its mechanical behavior and failure mechanism. To this end. in this paper three methologies are described for in-situ monitoring of the displacement & strain and the temperature, the oxide thickness. These are the Laser Speckle analysis with digital image correlation technique, the two-color infra-red thermometer and the laser reflection interferometry respectively. The calibration results and some issues which should be addressed for practical application are presented.


Thin Film;Digital Image Correlation;Infra Red Thermometer;Emissivity;Laser Reflection Interferometry;Laser Speckle


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