DOI QR코드

DOI QR Code

Design of UV-Molding Process to Maximize the Replication Properties in Microstructures

미세구조체의 전사 특성을 향상시키기 위한 UV 성형 공정의 설계

  • 김동묵 (연세대학교 대학원 기계공학과) ;
  • 김석민 (연세대학교 대학원 기계공학과) ;
  • 손소영 (연세대학교 컴퓨터 산업공학과) ;
  • 강신일 (연세대학교 기계공학부)
  • Published : 2003.03.01

Abstract

It is important to control the processing conditions to maximize the replication quality of UV-molded microstructure. In the present study, the tip radius anil surface roughness of V-groove structure were measured to quantify the replication quality. UV-curing dose and the applied pressure were experimentally selected as the governing Processing conditions that affect the replication quality of the UV-molded part. Finally. an experimental optimization technique combining central composite design and desirability function approach was used to maximize the replication quality of UV-molded structure.

Keywords

UV-Molding;Replication Quality;Central Composite Design;Desirability Function

References

  1. Montgomery, D. C., 1997, Design and Analysis of Experiments, John Wiley & Sons, pp. 451-453
  2. Sung, K., Lee, N., Kang, S., 2002, 'An Optimum Design of Replication Process to Improve Biregringence, Radial-Tilt and Land-Groove Structure in DVD-RAM Substrates,' Transactions of the KSME. A, Vol. 26, No.4, pp. 637-643 https://doi.org/10.3795/KSME-A.2002.26.4.637
  3. Derringer, G. and Suich, R., 1980, 'Simultaneous Optimization of Several Response Variables,' Journal of Quality Technology, Vol. 12, pp. 214-219
  4. Park, S.H., Kwon, Y.M. and Kim, J.J., 1995, 'Simultaneous Optimization of Multiple Responses for Robust Design,' Total Quality Management. Chapman & Hall, London, pp. 381-390
  5. Myers, R.H. and Carter, W.H., 1973, 'Response Surface Techniques for Dual Response Systems,' Technometrics, Vol.31,pp.137-157 https://doi.org/10.2307/1266990
  6. Khuri, A.I. and Conlon, J.A, 1981, 'Simultaneous Optimization of Multiple Response Represented by Polynomial Regression Function,' Technometrics, Vol. 23, pp. 363-375 https://doi.org/10.2307/1268226
  7. Dannberg. P., Bierbaum, R., Erdmann, L. and Brauer, A., 1999, 'Wafer Scale Integration of Micro-Optic and Optoelectronic Elements by Polymer UV Reaction Molding,' SPIE Conf. Photonics Packaging and Integration, Vol. 3631, pp. 244-251 https://doi.org/10.1117/12.348319
  8. Rudschuck, St., Hirsch, D., Zimmer, K., Otte. K., Braun A, Mehnert, R. and Bigl, F., 2000, 'Replication of 3D-Micro and Nanostructures using Different UV-Curable Polymers,' Microelectron. Eng., Vol. 53. pp. 557-560 https://doi.org/10.1016/S0167-9317(00)00377-4
  9. Tanigami, N., Ogata. S., Aoyama, S., Yamashita, T. and lrnanaka. K., 1989. 'Low Wavefront Aberration and High-Temperature Stability Molded Micro Fresnel Lens,' IEEE Photonic. Tech. L., Vol. 1, pp. 384-385 https://doi.org/10.1109/68.43387
  10. Moon, S.. Kang, S., Yee, Y. and Bu, J.U., 2001, 'Fabrication of Micro Lens Array Using Micro-Compression Molding,' Transactions of the KSME, A, Vol. 25, No. 8, pp. 1242-1245