Dynamic Analysis of the Piezo-Actuator for a New Generation Lithography System

차세대 리소그라피 시스템을 위한 압전구동기의 동적 해석

  • 박재학 (한양대학교 대학원 정밀기계공학과) ;
  • 정종철 (한양대학교 대학원 정밀기계공학과) ;
  • 허건수 (한양대학교 기계공학부) ;
  • 정정주 (한양대학교 전자전기컴퓨터공학부)
  • Published : 2003.03.01


A piezo-actuator is an important component for an E-beam lithography system. But it is very difficult to model its characteristics due to nonlinearities such as hysteresis and creep, to the input voltage. In this paper, one-axis micro stage with a piezo-actuator is modeled including the nonlinear properties. Hysteresis and creep are modeled as the first order differential equation and a time-dependent logarithmic function, respectively. The dynamic motion of the stage is also modeled as a mass-spring-damper system and the parameters are determined by utilizing the system identification technique. The simulation tool for a micro stage is constructed using the commercial software and its simulation results are compared with the experimental data.


Lithography System;Piezo-Actuator;Hysteresis;Creep;Micro Stage;Simulation Tool


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