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Ferroelectric Properties of Bi3.25La0.75Ti3O12 Thin Films with Various Drying Temperature for FRAM Applications

FRAM 응용을 위한 건조온도에 따른 BLT 박막의 강유전 특성

  • 김경태 (중앙대학교 전기전자공학부) ;
  • 김동표 (중앙대학교 전기전자공학부) ;
  • 김창일 (중앙대학교 전기전자공학부) ;
  • 김태형 (여주대학 전기과) ;
  • 강동희 (중앙대학교 화학과) ;
  • 심일운 (중앙대학교 화학과)
  • Published : 2003.04.01

Abstract

Ferroelectric lanthanum-substituted Bi$_4$Ti$_3$O$_{12}$(BLT) thin films were fabricated by spin-coating onto a Pt/Ti/SiO$_2$/Si substrate by metalorganic decomposition technique. The grain size in BLT thin films were prepared with controlled by various drying process. The effect of grain size on the crystallization and ferroelectric properties were investigated by x-ray diffraction and field emission scanning electron microscope. The dependence of crystallization and electrical properties are related to the grain size in BLT thin films with different drying temperature. The remanent polarization of BLT thin film increases with the increasing grain size. The value of 2P$_{r}$ and E$_{c}$ of BLT thin film dried at 45$0^{\circ}C$ were 25.9 $\mu$C/$\textrm{cm}^2$ and 85 kV/cm, respectively. The BLT thin film with larger grain size has better fatigue properties. The fatigue properties revealed that small grained film showed more degradation of switching charge than large grained films.lms.s.

Keywords

BLT;FRAM;Grain size;Ferroelectric;MOD

References

  1. Science v.246 Ferroelectric memories J. F. Scott;C. A. Paz de Araujo https://doi.org/10.1126/science.246.4936.1400
  2. 전기전자재료학회 논문지 v.13 no.8 MOD 법으로 제조한 강유전성 SBT 박막에서 하부전극이 유전및 전기적 특성에 미치는 영향 김태훈;김병호;송석표
  3. J. Phys. Chem. and Solids v.57 The grain size and domain size relations in bulk ceramic ferroelectric materials W. Cao;C. A. Randall https://doi.org/10.1016/0022-3697(96)00019-4
  4. J. Vac. Sci. Technol. v.A15 Effect of grain size and Pb dopant on luminescence in $BaTiO_3$ R. S. Katiyar;J. F. Meng;B. K. Rai
  5. J. Appl. Phys. v.88 Ferroelectric properties of $Bi_{3.25}La_{0.75}Ti_{3}O_{12}$ thin films prepared by chemical solution deposition Di Wu;Aidong Li;Tao Zhu https://doi.org/10.1063/1.1322387
  6. J. Mater, Res v.15 Domain structure and electrical properties of highly textured $PbZrxTi_{1-x}O_3$ thin films grown on $LaNiO_3$ electrode-buffered Si by metalorganic chemical vapor deposoition C. H. Lin;B. M. Yen;H. C. Kuo;H. Chen;T. B. Wu;G. E. Stillman https://doi.org/10.1557/JMR.2000.0020
  7. 전기전자재료학회논문지 v.12 no.2 PLD 기법에 의한 강유전체 SBT/YBCO/LaAIO₃헤테로 박막의 제작 및 특성 이재형;문병무;고중혁;구상모
  8. Thin Solid Films v.374 Thein fluence of Mg doping on the materials properties of $Ba_{1-x}Sr_xTiO_{3}$ thin films for tunable device applications M. W. Cole;P. C. Joshi;M. H. Ervin;M. C. Wood;R. L. Pfeffer https://doi.org/10.1016/S0040-6090(00)01059-2
  9. Nature v.401 Lanthanu-substituted bismuth titanate for use in nonvolatile memories B. H. Park;B. S. Kang;S. D. Bu;T. W. Noh;J. Lee;W. Jo https://doi.org/10.1038/44352
  10. Thin Solid Films v.406 The grain size effect of $Pb(Zr_{0.3}Ti_{0.7})O_3$ thin films F. Yan;P. Bao;H. L. W. Chan;C. L. Choy;Y. Wang https://doi.org/10.1016/S0040-6090(01)01745-X
  11. J. Appl. Phys. v.84 Imprint failures and asymmetric electrical properties induced by thermal processes in epitaxial $ Bi_{4}Ti_{3}O_{12}$ thin films B. H. Park;S. J. Hyun;C. R. Moon;B. D. Choe;J. Lee;C. Y. Kim;W. Jo;T. W. Noh https://doi.org/10.1063/1.368666
  12. 세라믹 유전체 공학 강기청
  13. Appl. Phys. Lett. v.66 Preparation and ferroelectric properties of $SrBi_2Ta_2O_9$ thin films K. Amanuma;T. Hase;Y. Miyasaka https://doi.org/10.1063/1.113140
  14. J. Appl. Phys. v.88 Microstructure, structural defects, and piezoelectric response of $Bi_4Ti_3O_{12}$ modified by $Bi_3TiNbO_9$ L. Sagalowicz;F. Chu;P. D. Martin;D. Damjanovic https://doi.org/10.1063/1.1327285
  15. J. Non Cryst. Solid v.254 Synthesis and properties of ferroelectric $SrBi_2Ta_2O_9$ Q. F. Zhou;H. L. W. Chan;C. L. Choy https://doi.org/10.1016/S0022-3093(99)00381-6
  16. 전기전자재료학회 논문지 v.11 no.3 MOD 법에 의한 강유전성 $Sr_{x}Bi_{y}Ta_{2}O_{9+{\alpha}}$ (SBT)박막의 제조 및 후열처리 효과에 관한 연구 김병호;윤희성;정병식;신동석
  17. J. Appl. Phys. v.90 Sol-Gel derived grain oriented barium strontium titanate thin films for phase shifter application S. B. majumder;M. Jain;A. Martinez;R. S. Katiyar https://doi.org/10.1063/1.1378811
  18. Appl. Phys. Lett. v.78 Improvements in electrical properties of hydrogen-treated $SrBi_{2}Ta_{2}O_{9}$ capacitors with chemical vapor deposited Pt Top electrode E. S. Choi;S. G. Yoon;W. J. Lee https://doi.org/10.1063/1.1347015
  19. J. Appl. Phys. v.83 The effect of grain and particle size on the microwave properties of barium titanate ($BaTiO_3$) M. P. McNeal;S. J. Jang;R. E. Newnham https://doi.org/10.1063/1.367097