Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)
- Volume 13 Issue 2
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- Pages.68-72
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- 2003
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- 1225-1429(pISSN)
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- 2234-5078(eISSN)
Abstract
In this paper, we developed a new thick photoresist fabrication technology for 3-dimensional microstructures. In general, like as AZ photoresist was coated with thin film thickness about 1
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References
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