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Fabrication and Properties of Au fine Particles Doped ZrO2 Thin Films by the Sol-gel Method

졸-겔법에 의한 Au 미립자 분산 ZrO2 박막의 제조와 특성

  • 이승민 (경남대학교 신소재공학부) ;
  • 문종수 (경남대학교 신소재공학부)
  • Published : 2003.05.01

Abstract

Nanocomposite of Au doped ZrO$_2$ films was prepared, which could be used as non-linear optic materials, selective absorption and transmission films. After heat treatment of prepared thin film by dip-coating method, the characteristics were investigated by X-ray diffraction, UV-VIS Spectrometer, Atomic Force Microscopy (AFM) and Scanning Electron Microscope (SEM). Film thickness was about 150 nm, the Au particle size was 15~35 nm. The thin film had a smooth surface roughness about 1.06 nm. Nonlinearity optics was found that films showed absorption peak at 600~650 nm visible region by plasma resonance of Au metal particles.

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