Tuning of a Laterally Driven Microresonator using Electrostatic Comb Step Array

계단식 정전빗살구조물을 이용한 수평구동형 미소공진기의 주파수 조정

  • 이기방 (한국과학기술원 디지털나노구동연구단) ;
  • 서영호 (한국과학기술원 디지털나노구동연구단) ;
  • 조영호 (한국과학기술원 디지털나노구동연구단)
  • Published : 2003.08.01


We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.


Frequency Tuning;Tunable Microresonator;Electrostatic Microactuator;Electrostatic Force;Stiffness Control


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