Development of Micromolding Technology using Silicone Rubber Mold

실리콘 고무형을 이용한 미세복제기술 개발

  • 정성일 (부산대학교 대학원 정밀기계공학과) ;
  • 임용관 (부산대학교 대학원 정밀기계공학과) ;
  • 김호윤 ;
  • 최재영 (부산대학교 대학원 정밀기계공학과) ;
  • 정해도 (부산대학교 정밀정형 및 금형가공연구소)
  • Published : 2003.08.01


Microsystem technology (MST) which originated from semiconductor processes has been widely spreaded into the other industry such as sensors, micro fluidics and displays. The MST, however, has been troubled in spreading with its high cost and material limitations. So, in this paper, new process for micromolding technology using silicone rubber mold was introduced. Silicone rubber mold, which was fabricated by vacuum casting, can be transferred a master pattern to a final product with the same shape but different materials. In order to verify the possibility of application of silicone rubber mold to the MST, its transferability was evaluated, and then it applied to the fabrications of polishing pad and PDP barrier ribs.


Micromolding Technology;Silicone Rubber Mold;Transferability;PDP Barrier Ribs;Polishing Pad


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