Design, Fabrication, and Performance Evaluation of a Sensorized Superelastic Alloy Microrobot Gripper

센서화된 초탄성 마이크로그리퍼의 설계, 제작 및 성능평가

  • 김덕호 (한국과학기술연구원 마이크로시스템센터) ;
  • 김병규 (한국과학기술연구원) ;
  • 강현재 (한국과학기술연구원 마이크로시스템센터) ;
  • 김상민 (한국과학기술연구원 마이크로시스템센터)
  • Published : 2003.10.01


This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fme alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.


Microgripper;Microassembly;Piezoelectric Polymer;Superelastic Alloy;Micro Force Sensing


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