Novel Design of Ultrashort Pulse Excimer Laser Amplifier System I (Energy Characteristics)

  • Lee, Young-Woo (Division of Electronics & Information Security Engineering, Mokwon University)
  • Published : 2003.03.01

Abstract

The technology required to advance the state of the art of ultra-high-intensity excimer amplifier construction to the 100 J/100fs output pulse level is identified. The preliminary design work for very large final amplifier pumped by electron beam module is described, and key design problems and approaches are presented and discussed in detail based on the recent experimental and theoretical results.

Keywords

excimer laser;wide-aperture amplifier;high power KrF laser;ultra-short high intensity laser

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