Influence of the Precursor Solutions on the Properties of BST Thin Films

  • Kang, Seong-Jun (Department of Semiconductor and Applied Physics, Yosu National University) ;
  • Joung, Yang-Hee (Department of Electrical Engineering, Yosu National University)
  • Published : 2003.06.01


We have studied the effects of solvents and additives in the precursor solutions on the characteristics of barium strontium titanate (BST) thin films. The solution having two solvents, ie. acetic acid for barium acetate and strontium acetate and 2-methoxyethanol for titanium isopropoxide and also having an additive of ethylene glycol shows good stability and remains homogeneous even after a month of ageing. It produces excellent BST thin film without cracks. Dielectric constant, loss tangent at 10KHz and leakage current density at 3V of the BST (70/30) thin film made from this solution are 339, 0.052 and 13.3 ${\mu}\textrm{A}$/$\texmrm{cm}^2$, respectively.


sol-gel;BST thin film;dielectric constant;leakage current


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