Fabrication of a PDMS (Poly-Dimethylsiloxane) Stamp Using Nano-Replication Printing Process

나노 복화(複畵)공정을 이용한 PDMS 스탬프 제작

  • 박상후 (한국과학기술원 대학원 기계공학과) ;
  • 임태우 (한국과학기술원 대학원 기계공학) ;
  • 양동열 (한국과학기술원 기계공학과) ;
  • 공홍진 (한국과학기술원 물리학)
  • Published : 2004.07.01


A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.


Nano-Replication Printing Process(nRP);Two-Photon Polymerization;Stamp;Femtosecond Laser


  1. Yi, S.W., Lee, S.K., Kong, H.J., Yang, D.Y., Park, S.H. and Lim, T.W., 'Three-Dimensional Micro-Fabrication Using Two-Photon Absorption by Femtosecond Laser,' Proceedings of SPIE, vo1.5342, pp.137-145, 2004
  2. Park, S.H., Lim, T.W., Jeong, C.G., Yang, D.Y., Yi, S.W., Lee, S.K. and Kong, H.J., 'Fundamental Process Development of a Ultramicro-Stereolithography Using a Femto-Second Laser for Manufacturing Nano-Scaled Features,' J. of KSPE, vol.21, no.3, pp.180-187, 2004
  3. Sun, H.B., Maeda, M., Takada, K., Chon, J.W.M., Gu, M. and Kawata, S., 2003, 'Experimental Investigation of Single Voxels for Laser Nanofabrication Via Two-Photon Photopolymerization,' Appl. Phys. Letters, vol.83, no.5, pp.819-821
  4. Kawata, S., Sun, H.B., Tanaka, T. and Takada, K., 2001, 'Finer Features for Functional Microdevices,' Nature, vol.412, no.16, pp.697-698
  5. Serbin, J., Egbert, A., Ostendorf, A. and Chichkov, B.N., 2003, 'Femtosecond Laser-Induced Two-Photon Polymerization of Inorganic-Organic Hybrid Materials for Applications in Photonics,' Optics letters, vol.28, no.5, pp.301-303
  6. Maruo, S. and Kawata, S., 1998, 'Two-Photon-Absorbed near-Infrared Photopolymerization for Three-Dimensional Microfabrication,' J. of Microelectromechanical Systems, vol.7, no.4, pp.411-415
  7. Sun, H.B., Tanaka, T. and Kawata, S., 2002, 'Three-Dimensional Focal Spots Related to Two-Photon Excitation,' Appl. Physics letters, vol.80, no.20, pp.3673-3675
  8. Odem, T.W., Love, J.C., Wolfe, D.B., Paul, K.E. and Whitesides, G.M., 2002, 'Improved Pattern Transfer in Soft Lithography Using Composite Stamps,' Langmuir vol.18, pp.5314-5320
  9. Schmid, H., Wolf, H., Allenspach, R., Riel, H., Karg, S., Michel, B. and Delamarche, E., 2003, 'Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing,' Adv. Funct. Mater., vol.13, no.2, pp.145-153
  10. Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W. and Kong, H.J., 2003, 'Development of a Nano Replication Printing(nRP) Process Using a Voxel matrix scanning scheme,' The KSPE Autumn Meeting, pp.424-427
  11. Chou,S.Y., Keimel. C. and Gu, J., 2002, 'Ultrafast and Direct Imprint of Nanostructures in Silicon,' Nature, vol.417, no.20, pp.835-837
  12. Xia, Y. and Whitesides, G.M., 1998, 'Soft Lithography,' Angew. Chern. Int. Ed, vol.37, pp.550-575<550::AID-ANIE550>3.0.CO;2-G
  13. Loo, Y.L., Lang, D.Y., Rogers, J.A. and Hsu, J.W.P., 2003, 'Electrical Contacts to Molecular Layers by Nanotransfer Printing,' Nano Letters, vol.3, no.7, pp.913-917
  14. Kim, C.S., Shtein, M. and Forrest, S.R., 2002, 'Nanolithography Based on Patterned Metal Transfer and Its Application to Organic Electronic Devices,' Appl. Phy. Letters, vol.80, no.21, pp.4051-4053