DOI QR코드

DOI QR Code

Oxidation of Amorphous BON Thin Films Grown by RF-PECVD

RF-PECVD 법으로 제조된 비정질 BON박막의 산화

  • Kim J. W. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
  • Boo J.-H. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
  • Lee D. B. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
  • 김재운 (성균관대학교 플라즈마 응용 표면기술센터) ;
  • 부진효 (성균관대학교 플라즈마 응용 표면기술센터) ;
  • 이동복 (성균관대학교 플라즈마 응용 표면기술센터)
  • Published : 2004.10.01

Abstract

The BON thin films were grown on the Si substrate by the RF-PECVD method. When stored at the room temperature, the phase separation or transition of BON thin films occurred on the surface, due to the hydrophilic property of BON. The oxidation of BON thin films occurred mainly by the evaporation of B, O and N. The oxidized BON thin films consisted of an amorphous phase and a bit of the polycrystalline phase.

References

  1. T. Lundstrom and Y.G. Andreev, Mater. Sci. Eng., A209, 16 (1996) https://doi.org/10.1016/0921-5093(95)10095-4
  2. R. C. DeVrises, in Cubic Boron Nitrided: Hanbook of Properties, General Electric Rep., No. 72CRD178, (1972)
  3. D. Xue and S. Zhang, Appl. Phys. A65, 451 (1997)
  4. J. Tian, L. Xia, X. Ma, Y. Sun, E. S. Byon, S. H. Lee and S. R. Lee, Thin Solid Films, 139, 247 (1986) https://doi.org/10.1016/0040-6090(86)90055-6
  5. S. P. S. Arya and A. D'aMico, Thin Solid Films, 157, 267 (1998) https://doi.org/10.1016/0040-6090(88)90008-9
  6. J.-H. Boo, C. Rohr and W. Ho. J. Cryst. Growth, 189/190, 439 (1998) https://doi.org/10.1016/S0022-0248(98)00323-6
  7. S. Sahu, S. Kavecky, L. Illesova, J. Madejova, I. Bertoti, and J. Szepvolgyi, J. Eurp. Ceram. Soc., 18, 1037-1043(1998) https://doi.org/10.1016/S0955-2219(98)00031-4
  8. D.-C. Lim, G. C. Chen and J.-H. Boo, Surf. Coat. Tech., 171, 101 (2003) https://doi.org/10.1016/S0257-8972(03)00248-2
  9. E. H. A. Dekempeneer, J. Meneve, S. Kuypers and J. Smeets, Thin Solid Films, 281, 331 (1996) https://doi.org/10.1016/0040-6090(96)08657-9
  10. E. Byon, M. S. Son, G. H. Lee and S. C. Kwon, J. Kor. Inst. Surf. Eng., 36, 229 (2003)
  11. S. Su, J. Molecular Structure, 430, 137 (1998) https://doi.org/10.1016/S0166-1280(98)90229-9
  12. H. T. Tsou and W. Kowbel, Surf. Coat. Tech., 79, 139 (1996) https://doi.org/10.1016/0257-8972(95)02424-7