Fabrication of waveguide using UV Ar-ion laser direct writing

Laser Direct Writing 방법을 이용한 광도파로 제작

  • Kang H. S. (Laser Application Group, Korea Institute of Machinery & Materials) ;
  • Suh J. (Laser Application Group, Korea Institute of Machinery & Materials) ;
  • Lee J. H. (Laser Application Group, Korea Institute of Machinery & Materials) ;
  • Kim J. O. (Laser Application Group, Korea Institute of Machinery & Materials)
  • 강희신 (한국기계연구원 레이저응용시스템그룹) ;
  • 서정 (한국기계연구원 레이저응용시스템그룹) ;
  • 이제훈 (한국기계연구원 레이저응용시스템그룹) ;
  • 김정오 (한국기계연구원 레이저응용시스템그룹)
  • Published : 2005.04.01

Abstract

The laser direct writing method using a UV Argon-ion laser is studied for fabrication of waveguide. The laser direct writing system is constructed with a vision camera, a xy-stage, a motion controller and the delivery components of a laser beam. The UV Argon-ion laser has wavelength range of $333.6\~363.8$ nm. A photo-active UV curable polymer for a planar light-wave circuit(PLC) of single mode is used. This polymer is irradiated by Argon-ion laser and developed by a solvent after a post-baking. The optimum laser direct writing condition is obtained experimentally by changing various process parameters such as laser power, writing speed and focal length. The propagation and coupling loss of a optical waveguide was measured as 1dB/cm and 0.6dB/cm, respectively. Also, the minimum width of waveguide of $100{\mu}m$(ZPLW-207) is obtained. Finally, the waveguides of line, bend and branch type are successfully fabricated.