Polymer Optical Microring Resonator Using Nanoimprint Technique

나노 임프린트 기술을 이용한 폴리머 링 광공진기

  • Kim, Do-Hwan (Department of Electrnic Engineering, Kwangwoon University) ;
  • Im, Jung-Gyu (Department of Electrnic Engineering, Kwangwoon University) ;
  • Lee, Sang-Shin (Department of Electrnic Engineering, Kwangwoon University) ;
  • Ahn, Seh-Won (Devices and Materials Lab., LG Electronics Institute) ;
  • Lee, Ki-Dong (Devices and Materials Lab., LG Electronics Institute)
  • 김도환 (광운대학교 전자공학과) ;
  • 임정규 (광운대학교 전자공학과) ;
  • 이상신 (광운대학교 전자공학과) ;
  • 안세원 (LG 전자기술원 소자재료연구소) ;
  • 이기동 (LG 전자기술원 소자재료연구소)
  • Published : 2005.08.01


A polymer optical microring resonator, which is laterally coupled to a straight bus waveguide, has been proposed and demonstrated using a nanoimprint technique. The propagation loss of the ring waveguide and the optical power coupling between the ring and bus waveguides was calculated by using a beam propagation method, then the dependence of the device performance on them was investigated using a transfer matrix method. We have especially introduced an imprint stamp incorporating a smoothing buffer layer made of a silicon nitride thin film. This layer played an efficient role in improving the sidewall roughness of the waveguide pattern engraved on the stamp and thus reducing the scattering loss. As a result the overall Q factor of the resonator was greatly increased. Also it reduced the gap between the ring and bus waveguides effectively to enhance the coupling between them, without relying on the direct writing method based on an e-beam writer. As for the achieved device performance at the wavelength of 1550 nm, the quality factor, the extinction ratio, and the free spectral range were ~103800, ~11 dB, and 1.16 m, respectively.


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