Agent-Based Scheduling for Semiconductor Wafer Fabrication Facilities

반도체 웨이퍼 팹의 에이전트 기반 스케쥴링 방법

  • 윤현중 (한국과학기술원 기계기술연구소)
  • Published : 2005.11.01


This paper proposes an agent-based scheduling method fur semiconductor wafer fabrication facilities with hard inter-operation temporal constraints. The scheduling problem is to find the feasible schedules that guarantee both logical and temporal correctness. A proposed multi-agent based architecture is composed of scheduling agents, workcell agents, and machine agents. A scheduling agent computes optimal schedules through bidding mechanisms with a subset or entire set of the workcell agents. A dynamic planning-based approach is adopted for the scheduling mechanism so that the dynamic behaviors such as aperiodic job arrivals and reconfiguration can be taken into consideration.


Scheduling;semiconductor wafer fabrication;agent system ;hard temporal constraints


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