High Performance Thermoelectric Scanning Thermal Microscopy Probe Fabrication

고성능 주사탐침열현미경 열전탐침 제작

  • 김동립 (고려대학교 기계공학과) ;
  • 김경태 (고려대학교 기계공학과) ;
  • 권오명 (고려대학교 기계공학과) ;
  • 박승호 (홍익대학교 기계 시스템 디자인 공학부) ;
  • 최영기 (중앙대학교 기계공학과) ;
  • 이준식 (서울대학교 기계 항공공학부)
  • Published : 2005.11.01


Scanning Thermal Microscope (STU) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available STU probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 m. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 m and the distance of the junction from the very end of the tip is 150 m. The probe is currently being used for nanoscale thermal probing of nano-material and nano device.


Scanning Thermal Microscope: SThM;Thermo-resistive probe;Thermoelectric probe


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