Machining Accuracy for Large Optical Mirror using On-Machine Spherical Surface ]Referenced Shack-Hartmann System

On-Machine 구면기준 Shack-Hartmann 장치를 이용한 대형 반사경의 가공 정밀도 연구

  • 홍정희 (충북대학교 대학원 기계공학부) ;
  • 오창진 (충북대학교 대학원 기계공학부) ;
  • 이응석 (충북대학교 대학원 기계공학부) ;
  • 김옥현 (충북대학교 대학원 기계공학부)
  • Published : 2005.05.01


A spherical surface referenced Shack-Hartmann method is studied for inspecting machining accuracy of large concave mirror This method is so strong to the vibration environment for using as an on-machine inspection system during polishing process of large optics comparing with the interferometry. The measuring uncertainty of the system is shown as less than p-v 150 m. On-machine measured surface profile data with this method is used for feed back control of the polishing time or depth to improve the surface profile accuracy of large concave mirror. Also, the spherical surface referenced Shack-Hartmann method is useful for measuring aspheric such as parabolic or hyperbolic surface profile, comparing that the interferomehy needs a special null lens, which is to be a reference and difficult to fabricate.


Concave Mirror;Corrective Polishing;Interferomeoy;On-Machine Measurement;Shack-Hartmann


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