# 표면 거칠기가 나노 응착력에 미치는 영향에 관한 실험적 연구

• Yang Seung Ho (Tribology Research Center, Korea Institute of Science and Technology)
• 양승호 (한국과학기술연구원 트라이볼로지 연구센터)
• Published : 2005.02.01

#### Abstract

Effect of Surface roughness on nanoscale adhesion was studied experimentally by using colloidal probe technique. Glass micro balls having the radius of $3.3\~17.4{\mu}m$ were glued at the end of AFM cantilevers to prepare colloidal probes. Adhesion force between the colloidal probe and Si-wafer was measured using pull-off force measuring method. Results showed that the measured adhesion forces are not the function of the radius of the glued balls because the ball surfaces are rough. It is also found that roughness parameters such as $R_a,\;R_q\;and\;R_{max}$ do not have important role on nanoscale adhesion. In order to find the effect of surface roughness on nanoscale adhesion, the bearing areas were extracted from the measured topography of glued balls. After normalizing the measured adhesion force with the bearing area, it was found that the normalized adhesion force kept constant as function of the radius of glued ball.

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