Fatigue Life Analysis on Multi-Stacked Film Under Thermal and Residual Stresses

열응력과 잔류응력하의 다층박막의 피로수명 해석

  • 박준협 (동명정보대학교 메카트로닉스공학과)
  • Published : 2005.04.01


Reliability problem in inkjet printhead, one of MEMS devices, is also very important. To eject an ink drop, the temperature of heater must be high so that ink contacting with surface reaches above $280^{o}C$ on the instant. Its heater is embedded in the thin multi-layer in which several materials are deposited. MEMS processes are the main sources of residual stresses development. Residual stress is one of the factors reducing the reliability of MEMS devices. We measured residual stresses of single layers that consist of multilayer. FE analysis is performed using design of experiment(DOE). Transient analysis for heat transfer is performed to get a temperature distribution. And then static analysis is performed with the temperature distribution obtained by heat transfer analysis and the measured residual stresses to get a stress distribution in the structure. Although the residual stress is bigger than thermal stress, thermal stress is more influential on fatigue life.


Micro-Electro Mechanical System(MEMS)Print Head;Fatigue Test;Fatigue Life;Heater


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