바이오 멤스 및 마이크로 시스템 적용을 위한 3차원 마이크로 유로 제작

Fabrication of 3-D microchannel for biomems and micro systems application

  • Yun, Kwang-Seok (Mechanical and Aerospace Engineering Department, University of California)
  • 발행 : 2006.09.30


This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed using three-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificial layer to levitate the structural photoresist and multi-step exposure to control the thicknesses of photoresist structures. Various shapes of photoresist structures were successfully fabricated. Using the PDMS replica method, the three-dimensional photoresist structures are demonstrated to be applicable for implementing complex microchannels in PDMS. In addition, more complex multilevel microchannels are constructed by bonding two PDMS layers with just single PDMS alignment.


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