Finite Element Analysis for Electron Optical System of a Field Emission SEM

전계방출 주사전자 현미경의 전자광학계 유한요소해석

  • 박근 (서울산업대학교 기계설계.자동화공학부) ;
  • 박만진 (서울대학교 대학원 기계항공공학부) ;
  • 김동환 (서울산업대학교 기계설계.자동화공학부) ;
  • 장동영 (서울산업대학교 산업정보시스템공학과)
  • Published : 2006.12.01


A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.



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