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Atomic Force Microscope for Standard Length Metrology

직교 스캐너와 레이저 간섭계를 사용한 교정용 원자현미경

  • 이동연 (한국과학기술원 기계공학과) ;
  • 김동민 (한국과학기술원 기계공학과) ;
  • 권대갑 (한국과학기술원 기계공학과)
  • Published : 2006.12.01

Abstract

A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nano-metrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range.

Keywords

Calibrated Atomic Force Microscope;Laser Interferometer;Orthogonal Scanner;Flexure-guide

References

  1. Binning G., Quate C. F. and Gerber Ch., 1986, 'Atomic Force Microscope,' Phy. Rev. Lett., Vol. 56, No. 9, pp. 930-933 https://doi.org/10.1103/PhysRevLett.56.930
  2. Schneir J., McWaid T. H., Alexander J. and Wilfley B. P., 1994, 'Design of an Atomic Force Microscope with Interferometric Position Control,' J. Vac. Sci. Technol. B, Vol. 12, No. 6, pp. 3561-3566 https://doi.org/10.1116/1.587471
  3. Dong- Yeon Lee, Kim D. M. and Gweon D. G., 2006, 'Design and Evaluation of Two Dimensional Metrological Atomic Force Microscope using a Planar Nanoscanner,' Jpn. J. Appl. Phys., Vol. 45, No. 3B, pp. 2124-2127 https://doi.org/10.1143/JJAP.45.2124
  4. Hasche K., Herrmann K., Mirand W., Seemann R., Vitushkin L., Xu M. and Yu G, 2002, 'Calibrated Scanning Force Microscope with Capabilities in the Subnanometre Range,' Surf Interface Anal., Vol. 33, pp.71-74 https://doi.org/10.1002/sia.1164
  5. Kwon J., Hong J., Kim Y. S., Lee Dong-Yeon, Lee S M. and Park S. I., 2003, 'Atomic Force Microscope with Improved Scan Accuracy, Scan Speed and Optical Vision,' Rev. Sci. Instrum., Vol. 74, No. 10, pp. 4378-4383 https://doi.org/10.1063/1.1610782
  6. Lee Dong-Yeon, Lee M. Y. and Gwoen D. G., 2006, 'Orthogonality Correction of Planar Sample Scanner for Atomic Force Microscope,' Jpn. J. Appl. Phys. Part2, Vol. 45, No. 13, pp. L370-L372 https://doi.org/10.1143/JJAP.45.L370
  7. Park J., Jo J., Byun S., Kim J. W., Eom T. B. and Eom C. I., 2006, 'Development of a Two-Dimensional nano-Displacement Measuring System Utilizing a 2D Combined Optical and X-ray Interferometer,' J. Korean Phys. Soc., Vol. 48, No. 1, pp. 28-32
  8. Smith S. T., Chetwynd D. G. and Bowen D. K., 1987 'Design and Assessment of Monolithic High Precision Translation Mechanisms,' J. Phys. E: Sci. Instrum., Vol. 20, pp. 977-983 https://doi.org/10.1088/0022-3735/20/8/005
  9. Lee Dong-Yeon, and Gweon D. G., 2006, 'Pseudo-Resonant Effect on a Flexure-Guided Nano-Positioning System,' J. Korean Phys. Soc., Vol. 48, No 3, pp. 363-370
  10. Misurni I., Gonda S., Kurosawa T. and Takamasu K., 2003, 'Uncertainty in Pitch Measurements of OneDimensional Grating Standards Using a Nanometrological Atomic Force Microscope,' Meas. Sci. Technol., Vol. 14, pp. 463-471 https://doi.org/10.1088/0957-0233/14/4/309
  11. Dai G., Pohlenz F., Danzebrink H. U., Xu M., Hasche K. and Wilkening G., 2004, 'Metrological Large Range Scanning Probe Microscope,' Rev. Sci. Instrum., Vol. 75, No. 4, pp. 962-969 https://doi.org/10.1063/1.1651638