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Development of a Fizeau Interferometer System for Measuring the Profile of Large Optical Lens

대구경 렌즈의 형상 측정을 위한 Fizeau 간섭계 시스템 개발

  • 배광환 (충북대학교 대학원 기계공학부) ;
  • 이응석 (충북대학교 대학원 기계공학부) ;
  • 이기암 (충북대학교 대학원 기계공학부) ;
  • 김옥현 (충북대학교 기계공학부)
  • Published : 2006.12.01

Abstract

Fizeau interferometer is well known optical instrument for measuring the lens profile accurately. The object of this study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for astronomical purpose. Measuring of large optical lens, the object could not be moved as small one but the measuring instrument must be moved for the alignment, because of the geometric conditions and the accuracy of the stage. Therefore, a five axis stage is designed to align the Interferometer instead of the measuring object. This instrument will be used for an on machine measuring system in polishing machine for large optical lens.

Keywords

Fizeau Interferometer;Large Optics;OMM(On Machine Measurement);Profile Measurement

References

  1. Daniel Malacara-Hemandez and Daniel Malacara-Doblado, 1999, 'Testing of Aspheric Wavefronts,' Fabrication and Testing of Aspferes, Optical Society of America, pp. 74-85
  2. David Williamson, Robert Kestner and Daniel Bajuk, 1999, 'Asphere in Microlithography,' Fabrication and Testing of Aspferes, Optical Society of America, pp. 8-16
  3. Eugene Hecht, 2002, Optics, Addison Wesley ?Long- man Inc.
  4. Song J. B., 2004, 'Phase Shift Shear Interferometer Using a Wedge Plate,' KAIST, PhD Thesis, pp. 15-23
  5. Kim D. H., 2004, 'Profile Measurement and ?Stabilization Using Laser Interferometer,' Chousun University, MSc Thesis, pp. 22-30
  6. Kim H. Y., 2001, 'Accuracy Improvement of Fizeau Interferometer,' KAIST, MSc Thesis, pp. 7-13