A Multi-chip Microelectrofluidic Bench for Modular Fluidic and Electrical Interconnections

전기 및 유체 동시접속이 가능한 멀티칩 미소전기유체통합벤치의 설계, 제작 및 성능시험

  • 장성환 (한국과학기술원 바이오시스템학과, 디지털나노구동연구단) ;
  • 석상도 (한국과학기술원 바이오시스템학과, 디지털나노구동연구단) ;
  • 조영호 (한국과학기술원 바이오시스템학과 및 기계공학과, 디지털나노구동연구단)
  • Published : 2006.04.01


We present the design, fabrication, and characterization of a multi-chip microelectrofluidic bench, achieving both electrical and fluidic interconnections with a simple, low-loss and low-temperature electrofluidic interconnection method. We design 4-chip microelectrofluidic bench, having three electrical pads and two fluidic I/O ports. Each device chip, having three electrical interconnections and a pair of two fluidic I/O interconnections, can be assembled to the microelectofluidic bench with electrical and fluidic interconnections. In the fluidic and electrical characterization, we measure the average pressure drop of $13.6{\sim}125.4$ Pa/mm with the nonlinearity of 3.1 % for the flow-rates of $10{\sim}100{\mu}l/min$ in the fluidic line. The pressure drop per fluidic interconnection is measured as 0.19kPa. Experimentally, there are no significant differences in pressure drops between straight channels and elbow channels. The measured average electrical resistance is $0.26{\Omega}/mm$ in the electrical line. The electrical resistance per each electrical interconnection is measured as $0.64{\Omega}$. Mechanically, the maximum pressure, where the microelectrofluidic bench endures, reaches up to $115{\pm}11kPa$.


Microelectrofluidic Bench;Multi-chip System;Micro-fluidic Modules;Electrofluidic Interconnection;Low-loss Interconnection;Low-temperature Assembly


  1. Reyes, D. R., Iossifidis, D., Auroux, P. -A. and Manz, A., 2002, 'Micro Total Analysis Systems. 1. Introduction, Theory, and Technology,' Analytical Chemistry, Vol.74, No.12, pp.2623-2636
  2. Hofmann, O., Niedermann, P. and Manz, A., 2001, 'Modular Approach to Fabrication of Three-dimensional Microchannel Systems in PDMS - Application to Sheath Flow Microchip,' Lab on a Chip Vol. 1, pp. 108-114
  3. Kikutani, Y., Tokeshi, M., Sato, K. and Kitamori, T., 2002, 'Integrated Chemical Systems on Microchips for Analysis and Assay. Potential Future, Mobile High-Performance Detection System for Chemical Weapons,' Pure and Applied Chemistry, Vol. 74, No. 12, pp. 2299-2309
  4. Schabmueller, C. G. J., Koch, M., Evans, A. G. R. and Brunnschweiler, A., 1999, 'Design and Fabrication of a Microfluidic Circuitboard,' Journal of Micromechanics and Microengineering, Vol. 9, pp. 176-179
  5. Yao, T. -J., Lee, S., Fang, W. and Tai, Y. -C., 2000, 'Micromachined Rubber O-ring Micro-Fluidic Couplers,' Proceedings of the 13th International Conference on Micro Electro Mechanical Systems, Miyazaki, Japan, pp. 624-627
  6. Gray, B. L., Collins, S. D. and Smith, R. L., 2004 'Interlocking Mechanical and Fluidic Interconnections for Microfluidic Circuit Boards,' Sensors and Actuators. Vol. A112, No. 1, pp. 18-24
  7. Duffy, D. C., McDonald, J. C., Schueller, O. J. A. and Whitesides, G.M., 1998, 'Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane),' Analytical Chemistry, Vol. 70, No. 23, pp. 4974-4984
  8. Lu, D., Tong, Q. K. and Wong, C. P., 1999, 'Conductivity Mechanism of Isotropic Conductive Adhesives (ICA's),' IEEE Transactions on Electronics Packaging, and Manufacturing, Vol. 22, No. 3, pp. 223-227
  9. Kovacs, G. T. A., 1998, Micromachined Transducers Sourcebook, WCB McGraw-Hill, Boston, pp. 839-858