Large Displacement Polymer Bimorph Actuator for Out-of-Plane Motion

DOI QR코드

DOI QR Code

Jeung Won-Kyu;Choi Seog-Moon;Kim Yong-Jun

  • 발행 : 2006.06.01

초록

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene (PVDF-TrFE). The large difference of coefficient of thermal expansion (CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a significant deflection with relatively small temperature rise. Compared to the most conventional micro actuators based on MEMS (micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. Additionally, we can achieve response time of 14.6 ms, resonance frequency of 12 Hz, and reliability ability of $10^5$ cycles. The proposed actuator can find applications where a large vertical displacement is needed while maintaining compact overall device size, such as a micro zooming lens, micro mirror, micro valve and optical application.

키워드

Micro Actuator;Polymer;Thermal bimorph;zooming lens

참고문헌

  1. Conway, N.J. Sang-Gook Kim, 'Large-strain, piezoelectric, in-plane micro-actuator' Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on MEMS, pp. 454 - 457, Jan. 2004
  2. Bhuiyan, M.M.I. Haga, Y. Esashi, M. 'Large displacement optical switching mechanism using SMA microactuator and magnetic latch' Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on MEMS, pp. 61 - 64, Jan. 2004
  3. Rashidian, B. Allen, M.G. 'Electrothermal micro-actuators based on dielectric loss heating' MEMS '93,Proceedings 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems'. IEEE, pp. 24 - 29, Feb. 1993
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