DOI QR코드

DOI QR Code

Interface between the Electroplated Copper-cobalt Thin Films and the Substrate

  • Kim, Jin-Gyu (Division of Electron Microscopic Research, Korea Basic Science Institute) ;
  • Lee, Jung-ju (Institute of Quantum Physics and Department of Physics, Chungnam National University) ;
  • Bae, Jong-hak (Institute of Quantum Physics and Department of Physics, Chungnam National University) ;
  • Bang, Won-bae (Institute of Quantum Physics and Department of Physics, Chungnam National University) ;
  • Hong, Kim-in (Institute of Quantum Physics and Department of Physics, Chungnam National University) ;
  • Yoon, C. H. (Department of Physics, Hannam University) ;
  • Son, Derac (Department of Physics, Hannam University) ;
  • Jeong, Kee-ju (Department of Physics Education, Kongju National University)
  • Published : 2006.09.01

Abstract

We electroplated copper-cobalt thin films on a silicon substrate, which had 150 nm thick copper seed layer. The adhesion between the two metallic layers could be increased by utilizing a proper organic additive, pulse plating technique, and high temperature annealing. The thin films exhibited columnar growth of the deposits and enhanced adhesion. This is attributed to the grain growth mechanism introduced by the additive and annealing.

References

  1. K. Liu, K. Nagodawithana, P. C. Searson, and C. L. Chien, Phys. Rev. B 51, 7381 (1995) https://doi.org/10.1103/PhysRevB.51.7381
  2. Y. Li, R. Fan, M. Moldovan, D. Young, W. Wang, and E. Podlaha, Proceedings of the 209th ECS Meeting (2006)
  3. V. M. Dubin, K. Hong, and N. Baxter, US Patent, 6,491,806 (2002)
  4. G. B. McFadden, S. R. Coriell, T. P. Moffat, D. Josell, D. Wheeler, W. Schwarzacher, and J. Mallett, J. Electrochem. Soc. 150(9), C591 (2003) https://doi.org/10.1149/1.1593042
  5. Kimin Hong, Jungju Lee, Jinhan Lee, Young-Dong Ko, Jin-Seok Chung, and Jin-Gyu Kim, J. Magn. Magn. Mater 304(1), 60 (2006) https://doi.org/10.1016/j.jmmm.2006.02.098
  6. Jinhan Lee, Jungju Lee, Jonghak Bae, Won Bae Bang, Kimin Hong, M. H. Lee, Sung G. Pyo, Sibum Kim, and Jin-Gyu Kim, J. Electrochem. Soc. 153(7), C521-C525 (2006) https://doi.org/10.1149/1.2203098
  7. Jungju Lee, Jinhan Lee, and Kimin Hong, Journal of Magnetics 10, 118 (2005) https://doi.org/10.4283/JMAG.2005.10.3.118
  8. A. Blondel et al., Appl. Phys. Lett. 65, 3019 (1994) https://doi.org/10.1063/1.112495
  9. A. J. Bard and L. R. Faulkner, Electrochemical Methods, Fundamentals and Applications, Wiley, New York (2001)
  10. Jonghak Bae, Wonbae Bang, Jin-Gyu Kim, and Kimin Hong, ECS Transactions, The Electrochemical Society, In press (2006)