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Fabrication of Nano-Structures on NiFe Film by Anodization with Atomic Force Microscope

  • Okada, T. (Department of Electrical and Electronic Engineering, Toyohashi University of Technology) ;
  • Uchida, H. (Department of Electrical and Electronic Engineering, Toyohashi University of Technology) ;
  • Inoue, M. (Department of Electrical and Electronic Engineering, Toyohashi University of Technology)
  • Published : 2006.09.01

Abstract

We studied local anodization on permalloy $(Ni_{80}Fe_{20})$ thin film with an atomic force microscope (AFM), which was performed by applying a voltage between the permalloy sample and conductive AFM tip. Comparing with anodization on Si (100) substrate, nano-structures on the permalloy thin film was fabricated with low processability.In order to improve the processability on the permalloy thin film, we used dot-fabrication method, thatis, a conductive AFM probe was kept at a position on the film during the anodization process.

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