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Robust Control for a Ultra-Precision Stage System

초정밀 스테이지의 강인 제어

  • 박종성 (충북대학교 기계공학과) ;
  • 정규원 (충북대학교 기계공학부)
  • Published : 2006.09.01

Abstract

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.

Keywords

Ultra-Precision Stage;Piezoelectric Actuator;Flexure Hinge;Hysteresis;Robust Control;Weighting Function

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