Alignment Method of Ion Beam Axis in Focused Ion Beam System

집속이온빔장치에서의 이온빔축 얼라인먼트

  • 박철우 (한국산업기술대학교 기계공학과) ;
  • 이종항 (한국산업기술대학교 기계공학과) ;
  • 강승언 (광운대학교 전자물리학과)
  • Published : 2006.09.01


This paper describes an alignment method of the ion column which is used for a focused-ion-beam machining system. The alignment parameters for mechanical and electrical components are introduced, and also sample images are used for evaluating the experiments. The experimental results show that geometrical positions of mechanical components have an influence on the quality of emitted ion beam. In addition, we can successfully align the traveling axis of ions by using mechanical and electrical methods.


Focused Ion Beam;Ion Column;Condenser Lens;Objective Lens;Alignment;Performance Test


  1. Orloff J., Utlaut M. and Swanson L., 2003, High Resolution Focused Ion Beams: FIB and its Applications, Kluwer Academic/Plenum Publisher, pp. 5-11
  2. Prewett P. D. and Mair G. L. R., 1991, Focused Ion Beam from Liquid Metal Ion Sources, Research studies press Ltd., pp. 151-175
  3. Matsui S., Kaito T., Fujita J., Komuro M., Kanda K. and Haruyama Y., 2000, 'Three-dimensional Nanostructure Fabrication by Focused-ion-beam Chemical Vapor Deposition,' J. Vac. Sci. Technol(B), Vol. 18, No. 6, pp. 3181-3184
  4. Morita T., Arimoto H., Miyauchi E., and Hashimoto H., 1987, 'Alignment Accuracy of Focused Ion Beam Implantation,' Jpn. J. Appl. Phys., Vol. 26, No. 6, pp. 955-958